MEMS Microphone

  • 网络MEMS麦克风;微机电麦克风
MEMS MicrophoneMEMS Microphone
  1. Fabrication process for the B-doped Si / Si two-layer back-plate MEMS microphone was also given .

    结合硼掺杂硅/硅复合背板结构MEMS传声器,提供了参考制作工艺流程。

  2. Design of MEMS Silicon Capacitive Microphone with a Piston Structure

    活塞式硅微电容传声器设计